Acoustic phonon characterisation of fixed-fixed beam MEMS switch

Abstract

The reported work focuses on an acoustic phonon characterisation method for MEMS devices. This technique is uniquely suited to address challenges of MEMS device characterisation as a low cost and non-destructive method. The mechanical switching action of a fixed-fixed beam MEMS switch is characterised using this acoustic phonon characterisation technique and a correlation between phonon measurements and electrical waveforms is carried out. Insights on the mechanical state of the switch are also obtained using this acoustic phonon characterisation technique. © The Institution of Engineering and Technology 2009.