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|Title:||Acoustic phonon characterisation of fixed-fixed beam MEMS switch||Authors:||Annamalai, M.
|Issue Date:||2009||Citation:||Annamalai, M., Palaniapan, M., Wong, W.-K. (2009). Acoustic phonon characterisation of fixed-fixed beam MEMS switch. Electronics Letters 45 (9) : 464-466. ScholarBank@NUS Repository. https://doi.org/10.1049/el.2009.3691||Abstract:||The reported work focuses on an acoustic phonon characterisation method for MEMS devices. This technique is uniquely suited to address challenges of MEMS device characterisation as a low cost and non-destructive method. The mechanical switching action of a fixed-fixed beam MEMS switch is characterised using this acoustic phonon characterisation technique and a correlation between phonon measurements and electrical waveforms is carried out. Insights on the mechanical state of the switch are also obtained using this acoustic phonon characterisation technique. © The Institution of Engineering and Technology 2009.||Source Title:||Electronics Letters||URI:||http://scholarbank.nus.edu.sg/handle/10635/54876||ISSN:||00135194||DOI:||10.1049/el.2009.3691|
|Appears in Collections:||Staff Publications|
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