Please use this identifier to cite or link to this item: https://doi.org/10.1049/el.2009.3691
Title: Acoustic phonon characterisation of fixed-fixed beam MEMS switch
Authors: Annamalai, M.
Palaniapan, M. 
Wong, W.-K. 
Issue Date: 2009
Source: Annamalai, M.,Palaniapan, M.,Wong, W.-K. (2009). Acoustic phonon characterisation of fixed-fixed beam MEMS switch. Electronics Letters 45 (9) : 464-466. ScholarBank@NUS Repository. https://doi.org/10.1049/el.2009.3691
Abstract: The reported work focuses on an acoustic phonon characterisation method for MEMS devices. This technique is uniquely suited to address challenges of MEMS device characterisation as a low cost and non-destructive method. The mechanical switching action of a fixed-fixed beam MEMS switch is characterised using this acoustic phonon characterisation technique and a correlation between phonon measurements and electrical waveforms is carried out. Insights on the mechanical state of the switch are also obtained using this acoustic phonon characterisation technique. © The Institution of Engineering and Technology 2009.
Source Title: Electronics Letters
URI: http://scholarbank.nus.edu.sg/handle/10635/54876
ISSN: 00135194
DOI: 10.1049/el.2009.3691
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