Please use this identifier to cite or link to this item: https://doi.org/10.1049/el.2009.3691
DC FieldValue
dc.titleAcoustic phonon characterisation of fixed-fixed beam MEMS switch
dc.contributor.authorAnnamalai, M.
dc.contributor.authorPalaniapan, M.
dc.contributor.authorWong, W.-K.
dc.date.accessioned2014-06-17T02:36:32Z
dc.date.available2014-06-17T02:36:32Z
dc.date.issued2009
dc.identifier.citationAnnamalai, M., Palaniapan, M., Wong, W.-K. (2009). Acoustic phonon characterisation of fixed-fixed beam MEMS switch. Electronics Letters 45 (9) : 464-466. ScholarBank@NUS Repository. https://doi.org/10.1049/el.2009.3691
dc.identifier.issn00135194
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/54876
dc.description.abstractThe reported work focuses on an acoustic phonon characterisation method for MEMS devices. This technique is uniquely suited to address challenges of MEMS device characterisation as a low cost and non-destructive method. The mechanical switching action of a fixed-fixed beam MEMS switch is characterised using this acoustic phonon characterisation technique and a correlation between phonon measurements and electrical waveforms is carried out. Insights on the mechanical state of the switch are also obtained using this acoustic phonon characterisation technique. © The Institution of Engineering and Technology 2009.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1049/el.2009.3691
dc.sourceScopus
dc.typeArticle
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1049/el.2009.3691
dc.description.sourcetitleElectronics Letters
dc.description.volume45
dc.description.issue9
dc.description.page464-466
dc.description.codenELLEA
dc.identifier.isiut000266264700020
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