Laser cleaning of microparticles - Theoretical prediction of threshold laser fluence

Abstract

A theoretical model for laser cleaning of microparticles from solid surface was established by taking adhesion force and cleaning force into account. The threshold fluence can be obtained from this model and verified by the experimental results. It was found that laser irradiation from the reverse side of transparent substrate is more effective to remove particles than that from the front side. Laser irradiation with shorter wavelength can result in higher cleaning efficiency and lower threshold fluence for removal of particles from solid surfaces.