Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/50631
Title: Laser cleaning of microparticles - Theoretical prediction of threshold laser fluence
Authors: Lu, Y.F. 
Song, W.D. 
Hong, M.H. 
Chan, D.S.H. 
Low, T.S. 
Keywords: Cleaning force
Cleaning threshold
Laser cleaning
Microparticles
Van der Waals force
Issue Date: 1997
Source: Lu, Y.F.,Song, W.D.,Hong, M.H.,Chan, D.S.H.,Low, T.S. (1997). Laser cleaning of microparticles - Theoretical prediction of threshold laser fluence. Proceedings of SPIE - The International Society for Optical Engineering 3097 : 352-357. ScholarBank@NUS Repository.
Abstract: A theoretical model for laser cleaning of microparticles from solid surface was established by taking adhesion force and cleaning force into account. The threshold fluence can be obtained from this model and verified by the experimental results. It was found that laser irradiation from the reverse side of transparent substrate is more effective to remove particles than that from the front side. Laser irradiation with shorter wavelength can result in higher cleaning efficiency and lower threshold fluence for removal of particles from solid surfaces.
Source Title: Proceedings of SPIE - The International Society for Optical Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/50631
ISSN: 0277786X
Appears in Collections:Staff Publications

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