Please use this identifier to cite or link to this item: https://doi.org/10.1002/adom.202202228
Title: Mid-Infrared Silicon-on-Lithium-Niobate Electro-Optic Modulators Toward Integrated Spectroscopic Sensing Systems
Authors: Xu, Siyu 
Ren, Zhihao 
Dong, Bowei 
Zhou, Jingkai 
Liu, Weixin 
Lee, Chengkuo 
Keywords: Science & Technology
Technology
Physical Sciences
Materials Science, Multidisciplinary
Optics
Materials Science
electro-optic modulators
lithium niobate
mid-infrared waveguide platform
pure phase modulation
silicon photonics
transfer printing
NITRIDE PHOTONIC CIRCUITS
MACH-ZEHNDER MODULATORS
THIN-FILM
PHASE-SHIFTER
WAVE-GUIDES
METAMATERIAL
MEMS
PROGRESS
PLATFORM
CHIP
Issue Date: 9-Dec-2022
Publisher: WILEY-V C H VERLAG GMBH
Citation: Xu, Siyu, Ren, Zhihao, Dong, Bowei, Zhou, Jingkai, Liu, Weixin, Lee, Chengkuo (2022-12-09). Mid-Infrared Silicon-on-Lithium-Niobate Electro-Optic Modulators Toward Integrated Spectroscopic Sensing Systems. ADVANCED OPTICAL MATERIALS 11 (4). ScholarBank@NUS Repository. https://doi.org/10.1002/adom.202202228
Abstract: Mid-infrared spectroscopy is an emerging technique in various applications such as molecule identification and label-free chemical sensing. Integrated photonic platforms have a promising potential to perform miniaturized spectroscopic sensing with the advantage of compact footprint, low cost, and low power consumption. As an essential building block for integrated photonics, on-chip phase shifter plays an important role in mid-infrared spectroscopic systems, enabling signal processing and spectrum analysis. However, the implementation of effective pure phase modulation in mid-infrared photonics remains challenging due to the unavoidable electroabsorption in the plasma dispersion effect at a long wavelength. Here, silicon photonic devices are built on lithium niobate substrates to simultaneously leverage the prominent electro-optic effect and circumvent the absorption originating from the oxide layer. In particular, a reliable transfer printing method is presented for flexibly integrating the monocrystalline silicon waveguides with foreign substrates. In the fabricated silicon-on-lithium-niobate platform, the electro-optic performance is exploited via Mach–Zehnder interferometer for operation in the mid-infrared regime. The modulator achieves half-wave voltage length product of 12.3 V∙cm at the wavelength of 3.78 µm, with a maximum extinction ratio of 25.2 dB. These results indicate the potential of the proposed technology for the implementation of integrated mid-infrared spectroscopic sensing systems.
Source Title: ADVANCED OPTICAL MATERIALS
URI: https://scholarbank.nus.edu.sg/handle/10635/239127
ISSN: 2195-1071
DOI: 10.1002/adom.202202228
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