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Title: Subwavelength-Engineered Suspended Silicon Waveguide for Long-Wave Infrared Sensing Applications
Authors: Liu, W 
Ma, Y 
Chang, Y 
Dong, B 
Wei, J 
Ren, Z 
Lee, C 
Keywords: mid-infrared
suspended Si waveguide
subwavelength grating
chemical sensor
photonic platform
Issue Date: 25-Jan-2021
Publisher: IEEE
Citation: Liu, W, Ma, Y, Chang, Y, Dong, B, Wei, J, Ren, Z, Lee, C (2021-01-25). Subwavelength-Engineered Suspended Silicon Waveguide for Long-Wave Infrared Sensing Applications. 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) 2021-January : 302-305. ScholarBank@NUS Repository.
Abstract: Many volatile organic compounds (VOCs) are regarded as major indoor pollutants and potentially threaten human health in the short- and long-term. Several VOCs are also indicators for specific diseases. Thus, portable and selective detection of VOCs is highly desired. In this letter, a chip-scale subwavelength-engineered suspended silicon waveguide platform working in the long-wave infrared is demonstrated for toluene vapor detection. The broadband characterization of this platform is presented and a flat transmission spectrum over the measured wavelength range is shown. With 3.8 dB/cm propagation loss achieved at the toluene absorption fingerprint of 6.65 μm, the limit of detection of toluene sensing reaches 6 ppm. The response and recovery time to the 6 ppm toluene are 3.0 and 5.6 s, respectively. This chip-scale optical gas sensing platform is a promising candidate for on-site real-time environmental monitoring and medical diagnosis.
Source Title: 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
ISBN: 9781665419123
ISSN: 1084-6999
DOI: 10.1109/MEMS51782.2021.9375151
Appears in Collections:Staff Publications

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