Please use this identifier to cite or link to this item: https://doi.org/10.1002/adom.201900653
Title: Leveraging of MEMS Technologies for Optical Metamaterials Applications
Authors: Ren, Zhihao 
Chang, Yuhua 
Ma, Yiming 
Shih, Kailing 
Dong, Bowei 
LEE CHENGKUO 
Keywords: Science & Technology
Technology
Physical Sciences
Materials Science, Multidisciplinary
Optics
Materials Science
infrared detectors
metamaterials
micro
nanofluidics
microelectromechanical system
terahertz devices
ENHANCED INFRARED-ABSORPTION
ELECTROMAGNETICALLY INDUCED TRANSPARENCY
NEGATIVE REFRACTIVE-INDEX
BAND ACHROMATIC METALENS
COUPLED-MODE THEORY
TERAHERTZ METAMATERIAL
PLASMONIC NANOANTENNAS
RESONANCE ENHANCEMENT
DYNAMIC MANIPULATION
MAGNETIC RESPONSE
Issue Date: 19-Jul-2019
Publisher: WILEY-V C H VERLAG GMBH
Citation: Ren, Zhihao, Chang, Yuhua, Ma, Yiming, Shih, Kailing, Dong, Bowei, LEE CHENGKUO (2019-07-19). Leveraging of MEMS Technologies for Optical Metamaterials Applications. ADVANCED OPTICAL MATERIALS 8 (3). ScholarBank@NUS Repository. https://doi.org/10.1002/adom.201900653
Abstract: © 2019 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim Tunable metamaterial devices have experienced explosive growth in the past decades, driving the traditional electromagnetic (EM) devices to evolve into diversified functionalities by manipulating EM properties such as amplitude, frequency, phase, polarization, and propagation direction. However, one of the bottlenecks of these rapidly developed metamaterials technologies is limited tunability caused by the intrinsic frequency-dependent property of exotic tunable material. To overcome such limitation, the microelectromechanical system (MEMS) enabling micro/nanoscale manipulation is developed to actively control “meta-atom” in terahertz and infrared region, which brings frequency-scalable tunability and complementary metal-oxide-semiconductor-compatible functional meta-devices. Beyond tunability, novel chemical sensing platforms of molecular identification and dynamic monitoring of the biochemical process can be achieved by integrating micro/nanofluidics channels with metamaterial resonators. Additionally, incorporating metamaterial absorbers with MEMS resonators brings another research interest in MEMS zero-power devices and radiation sensors. Furthermore, moving from 2D metasurfaces to 3D metamaterials, enhanced EM properties like novel resonance mode, giant chirality, and 3D manipulation reinforce the application in biochemical and physical sensors as well as functional meta-devices, paving the way to realize multi-functional sensing and signal processing on a hybrid smart-sensor microsystem for booming healthcare, environmental monitoring, and the Internet of Things applications.
Source Title: ADVANCED OPTICAL MATERIALS
URI: https://scholarbank.nus.edu.sg/handle/10635/168949
ISSN: 2195-1071
2195-1071
DOI: 10.1002/adom.201900653
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