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Title: Towards low-loss waveguides in SOI and Ge-on-SOI for mid-IR sensing
Authors: Younis, Usman 
Luo, Xianshu
Dong, Bowei 
Huang, Li 
Vanga, Sudheer K. 
Lim, Andy Eu-Jin
Lo, Patrick Guo-Qiang
Lee, Chengkuo 
Bettiol, Andrew A. 
Ang, Kah-Wee 
Keywords: Germanium
Infrared measurements
Monolithic integrated circuits
Silicon on insulator technology
Waveguide components
Issue Date: 25-Apr-2018
Publisher: Institute of Physics Publishing
Citation: Younis, Usman, Luo, Xianshu, Dong, Bowei, Huang, Li, Vanga, Sudheer K., Lim, Andy Eu-Jin, Lo, Patrick Guo-Qiang, Lee, Chengkuo, Bettiol, Andrew A., Ang, Kah-Wee (2018-04-25). Towards low-loss waveguides in SOI and Ge-on-SOI for mid-IR sensing. JOURNAL OF PHYSICS COMMUNICATIONS 2 (4). ScholarBank@NUS Repository.
Abstract: Silicon-on-insulator is an attractive choice for developing mid-infrared photonic integrated circuits. It benefits from mature fabrication technologies and integration with on-chip electronics. We report the development of SOI channel and rib waveguides for mid-infrared wavelengths centered at 3.7 ?m. Propagation loss of ~1.44 dB/cm and ~1.2 dB/cm has been measured for TE and TM polarizations in channel waveguides, respectively. Similarly, propagation loss of ~1.39 dB/cm and ~2.82 dB/cm has been measured for TE and TM polarized light in rib waveguides. The propagation loss is consistent with the measurements obtained using a different characterization setup and for the same waveguide structures on a different chip. Given the tightly confined single-mode in our 400 nm thick Si core, this propagation loss is among the lowest losses reported in literature. We also report the development of Ge-on-SOI strip waveguides for mid-infrared wavelengths centered at 3.7 ?m. Minimum propagation loss of ~8dB/cm has been measured which commensurate with that required for high power mid-infrared sensing. Ge-on-SOI waveguides provide an opportunity to realize monolithically integrated circuit with on-chip light source and photodetector. © 2018 The Author(s). Published by IOP Publishing Ltd.
ISSN: 23996528
Appears in Collections:Staff Publications

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