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Woei Wan Tan

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Full Name
Woei Wan Tan
Variants
Wan Tan, Woei
Woei Wan Tan
Wan, T.W.
TAN, WOEI WAN
Tan, W.
Tan, W.-W.
Tan, W.W.
Wan Tan, W.
Tan W.W
 
Main Affiliation
 
Faculty
 
Email
eletanww@nus.edu.sg
 
Other emails
 

Publications

Refined By:
Department:  COLLEGE OF DESIGN AND ENGINEERING
Author:  Khuen, H.W.
Department:  ELECTRICAL & COMPUTER ENGINEERING

Results 1-7 of 7 (Search time: 0.007 seconds).

Issue DateTitleAuthor(s)
12004A novel wafer baking system using hot air streamsLan, W.; Loong, C.S.; Poh, L.A. ; Ming, G.Z.; Wan, T.W. ; Tay, A. ; Khuen, H.W. 
22002Control and signal processing for photoresist processing in microlithographyTay, A. ; Ho, W.K. ; Lim, K.W. ; Loh, A.P. ; Tan, W.W. 
3May-2004Integrated bake/chill module with in situ temperature measurement for photoresist processingTay, A. ; Ho, W.-K. ; Loh, A.-P. ; Lim, K.-W. ; Tan, W.-W. ; Schaper, C.D.
42005Integrated metrology and processes for semiconductor manufacturingHo, W.K. ; Tay, A. ; Lim, K.W.; Loh, A.P. ; Tan, W.W. 
57-Jun-2006Iterative learning approach toward closed-loop automatic tuning of PID controllersTan, K.K. ; Zhao, S. ; Chua, K.Y.; Ho, W.K. ; Tan, W.W. 
6Feb-2008RTD response time estimation in the presence of temperature variations and its application to semiconductor manufacturingTan, W.W. ; Li, R.F.Y.; Loh, A.P. ; Ho, W.K. 
7Feb-2007Temperature control and in situ fault detection of wafer warpageHo, W.K. ; Yap, C. ; Tay, A. ; Chen, W.; Zhou, Y.; Tan, W.W. ; Chen, M.