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Ee Beng, Arthur Tay

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Full Name
Ee Beng, Arthur Tay
Variants
Tay, Arthur
Tay, A.
Tay, E.B.
 
Main Affiliation
 
Faculty
 
Email
eletaya@nus.edu.sg
 

Publications

Refined By:
Author:  Tay, A.
Author:  Ho, W.-K.

Results 41-54 of 54 (Search time: 0.006 seconds).

Issue DateTitleAuthor(s)
41Jan-2007Real-time control of photoresist extinction coefficient uniformity in the microlithography processTay, A. ; Ho, W.K. ; Wu, X.
422007Real-time estimation and control of photoresist properties in microlithographyWu, X.; Tay, A. ; Ho, W.K. ; Tan, K.K. 
432006Real-time monitoring of photoresist thickness contour in microlithographyHo, W.K. ; Chen, X.; Wu, X.; Tay, A. 
442007Real-time spatial control of photoresist development rateTay, A. ; Ho, W.-K. ; Hu, N.; Kiew, C.-M.; Tsai, K.-Y.
452006Real-time spatial control of steady-state wafer temperature during thermal processing in microlithographyTay, A. ; Ho, W.-K. ; Hu, N.; Tsai, K.-Y.; Zhou, Y.
46Aug-2002Resist film uniformity in the microlithography processHo, W.K. ; Lee, L.L.; Tay, A. ; Schaper, C.
472006Robust real-time thin film thickness estimationKiew, C.M.; Tay, A. ; Ho, W.K. ; Lim, K.W. ; Lee, J.H.
482002Run-to-run process control for chemical mechanical polishing in semiconductor manufacturingDa, L.; Kumar, V.G.; Tay, A. ; Al Mamun, A. ; Ho, W.K. ; See, A.; Chan, L.
49Feb-2007Temperature control and in situ fault detection of wafer warpageHo, W.K. ; Yap, C. ; Tay, A. ; Chen, W.; Zhou, Y.; Tan, W.W. ; Chen, M.
502004Temperature control and in-situ fault detection of wafer warpageHo, W.K. ; Yap, C. ; Tay, A. ; Chen, W.; Lim, K.W.
51Mar-2003The intelligent alarm management systemLiu, J. ; Lim, K.W. ; Ho, W.K. ; Tan, K.C. ; Srinivasan, R. ; Tay, A. 
52Mar-2003The intelligent alarm management systemLiu, J. ; Lim, K.W. ; Ho, W.K. ; Tan, K.C. ; Srinivasan, R. ; Tay, A. 
53Nov-2005Using the OPC standard for real-time process monitoring and controlLiu, J.; Lim, K.W.; Ho, W.K. ; Tan, K.C. ; Tay, A. ; Srinivasan, R. 
542003Warpage Detection during Baking of Semiconductor substrate in MicrolithographyHo, W.K. ; Tay, A. ; Lim, K.W. ; Zhou, Y.; Yang, K.