Ee Beng, Arthur Tay

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Full Name

Ee Beng, Arthur Tay

Variants

Tay, Arthur
Tay, A.
Tay, E.B.

Main Affiliation

ELECTRICAL AND COMPUTER ENGINEERING
COLLEGE OF DESIGN AND ENGINEERING
DEAN'S OFFICE (COLLEGE OF DESIGN & ENG)

Faculty

FAC OF ENGINEERING
COLLEGE OF DESIGN & ENG

eletaya@nus.edu.sg

Refined By:

Author: Tay, A.

Subject: Temperature control

Subject: Lithography

Results 1-6 of 6 (Search time: 0.007 seconds).

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	Issue Date	Title	Author(s)
1	Apr-2009	A heater plate assisted bake/chill system for photoresist processing in photolithography	Chua, H.T.; Tay, A. ; Wang, Y.; Wu, X.
2	Mar-2010	Equipment design and control of advanced thermal-processing module in lithography	Tay, A. ; Chua, H.T.; Wang, Y.; Ngo, Y.S.
3	Nov-2001	Minimum time control of conductive heating systems for microelectronics processing	Tay, A. ; Ho, W.K. ; Poh, Y.P.
4	Jan-2007	Real-time control of photoresist extinction coefficient uniformity in the microlithography process	Tay, A. ; Ho, W.K. ; Wu, X.
5	2007	Real-time spatial control of photoresist development rate	Tay, A. ; Ho, W.-K. ; Hu, N.; Kiew, C.-M.; Tsai, K.-Y.
6	2001	Spatially-programmable thermal processing module for 300 mm wafer processing	Tay, A. ; Khiang Wee Lim; Ai Poh Loh; Woei Wan Tan; Weng Khuen Ho; Huang, A. ; Fu, J.