Ee Beng, Arthur Tay

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Full Name

Ee Beng, Arthur Tay

Variants

Tay, Arthur
Tay, A.
Tay, E.B.

Main Affiliation

ELECTRICAL AND COMPUTER ENGINEERING
COLLEGE OF DESIGN AND ENGINEERING
DEAN'S OFFICE (COLLEGE OF DESIGN & ENG)

Faculty

FAC OF ENGINEERING
COLLEGE OF DESIGN & ENG

eletaya@nus.edu.sg

Refined By:

Author: Tay, A.

Subject: Photoresist processing

Subject: Real-time control

Results 1-4 of 4 (Search time: 0.002 seconds).

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	Issue Date	Title	Author(s)
1	Feb-2007	An in situ approach to real-time spatial control of steady-state wafer temperature during thermal processing in microlithography	Tay, A. ; Ho, W.K. ; Hu, N.
2	2008	CD uniformity control via real-time control of photoresist properties	Chen, M.; Fu, J. ; Ho, W.K. ; Tay, A.
3	2009	In-situ monitoring and control of photoresist parameters during thermal processing in the lithography sequence	Wu, X.; Yang, G.; Lim, E.-X.; Tay, A.
4	Jan-2007	Real-time control of photoresist extinction coefficient uniformity in the microlithography process	Tay, A. ; Ho, W.K. ; Wu, X.