Ee Beng, Arthur Tay

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Full Name

Ee Beng, Arthur Tay

Variants

Tay, Arthur
Tay, A.
Tay, E.B.

Main Affiliation

ELECTRICAL AND COMPUTER ENGINEERING
COLLEGE OF DESIGN AND ENGINEERING
DEAN'S OFFICE (COLLEGE OF DESIGN & ENG)

Faculty

FAC OF ENGINEERING
COLLEGE OF DESIGN & ENG

eletaya@nus.edu.sg

Refined By:

Author: Tay, A.

Author: Ho, W.-K.

Author: Hu, N.

Results 1-6 of 6 (Search time: 0.003 seconds).

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	Issue Date	Title	Author(s)
1	Feb-2007	An in situ approach to real-time spatial control of steady-state wafer temperature during thermal processing in microlithography	Tay, A. ; Ho, W.K. ; Hu, N.
2	2004	Detection of Wafer warpages during thermal processing in microlithography	Ho, W.K. ; Tay, A. ; Zhou, Y.; Yang, K.; Hu, N.
3	Jul-2005	Estimation of wafer warpage profile during thermal processing in microlithography	Tay, A. ; Ho, W.K. ; Hu, N.; Chen, X.
4	2004	Fault detection and estimation of wafer warpage profile during thermal processing in microlithography	Tay, A. ; Ho, W.K. ; Hu, N.; Zhou, Y.
5	2007	Real-time spatial control of photoresist development rate	Tay, A. ; Ho, W.-K. ; Hu, N.; Kiew, C.-M.; Tsai, K.-Y.
6	2006	Real-time spatial control of steady-state wafer temperature during thermal processing in microlithography	Tay, A. ; Ho, W.-K. ; Hu, N.; Tsai, K.-Y.; Zhou, Y.