Please use this identifier to cite or link to this item: https://doi.org/10.1143/JJAP.50.04DF06
Title: Reduced contact resistance and improved surface morphology of ohmic contacts on gan employing krf laser irradiation
Authors: Wang, G.H.
Wong, T.-C.
Wang, X.-C.
Zheng, H.-Y.
Chan, T.-K. 
Osipowicz, T. 
Foo, Y.-L.
Tripathy, S.
Issue Date: Apr-2011
Citation: Wang, G.H., Wong, T.-C., Wang, X.-C., Zheng, H.-Y., Chan, T.-K., Osipowicz, T., Foo, Y.-L., Tripathy, S. (2011-04). Reduced contact resistance and improved surface morphology of ohmic contacts on gan employing krf laser irradiation. Japanese Journal of Applied Physics 50 (4 PART 2) : -. ScholarBank@NUS Repository. https://doi.org/10.1143/JJAP.50.04DF06
Abstract: We employ excimer laser annealing for ohmic contact formation to n- and p-type GaN layers grown on sapphire substrates. The laser irradiation of the n-GaN layers led to increased nitrogen vacancies at the nitride surface, which promoted tunneling currents with a less resistive n-contact. For p-GaN layer, the laser irradiation increased the effective hole concentration that resulted in a reduced contact resistivity. The lowest specific contact resistance measured using the transmission line method was about 2:4 × 10 -7 and 3:2 × 10-4 ωcm2 for n- and p-contacts, respectively. Laser irradiation also resulted in a comparatively good surface morphology as compared to rapid thermal annealing, which in turn improved the transmittance of contacts for light extraction from active layers. It was found out that both the electrical and optical characteristics of the p-GaN contacts exhibited a good thermal stability and an improved transmittance in the blue-green spectral range. An increased forward current with a reduced ohmic contact resistance in such high thermal stable contacts enable the fabrication of GaN light emitting diodes. © 2011 The Japan Society of Applied Physics.
Source Title: Japanese Journal of Applied Physics
URI: http://scholarbank.nus.edu.sg/handle/10635/97779
ISSN: 00214922
DOI: 10.1143/JJAP.50.04DF06
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

6
checked on Nov 13, 2019

WEB OF SCIENCETM
Citations

5
checked on Nov 13, 2019

Page view(s)

71
checked on Nov 9, 2019

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.