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https://doi.org/10.1016/S0924-4247(98)00272-6
| Title: | AlxGa1-xAs semiconductor sensor for contact pressure measurement | Authors: | Toh, S.-L. Tay, C.-J. Ng, S.-H. Rahman, M. |
Issue Date: | 25-Jan-2000 | Citation: | Toh, S.-L., Tay, C.-J., Ng, S.-H., Rahman, M. (2000-01-25). AlxGa1-xAs semiconductor sensor for contact pressure measurement. Sensors and Actuators, A: Physical 79 (1) : 31-35. ScholarBank@NUS Repository. https://doi.org/10.1016/S0924-4247(98)00272-6 | Abstract: | The use of AlxGa1-x As film based sensors for measuring contact pressure is described. It is shown that the pressure sensors display a nearly linear dependence of resistance to contact pressure and temperature. Pressure sensitivity ranges from 0.09%/MPa to 0.12%/MPa (with a non-linearity of | Source Title: | Sensors and Actuators, A: Physical | URI: | http://scholarbank.nus.edu.sg/handle/10635/92655 | ISSN: | 09244247 | DOI: | 10.1016/S0924-4247(98)00272-6 |
| Appears in Collections: | Staff Publications |
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