Please use this identifier to cite or link to this item: https://doi.org/10.1016/S0924-4247(98)00272-6
DC FieldValue
dc.titleAlxGa1-xAs semiconductor sensor for contact pressure measurement
dc.contributor.authorToh, S.-L.
dc.contributor.authorTay, C.-J.
dc.contributor.authorNg, S.-H.
dc.contributor.authorRahman, M.
dc.date.accessioned2014-10-16T03:07:05Z
dc.date.available2014-10-16T03:07:05Z
dc.date.issued2000-01-25
dc.identifier.citationToh, S.-L., Tay, C.-J., Ng, S.-H., Rahman, M. (2000-01-25). AlxGa1-xAs semiconductor sensor for contact pressure measurement. Sensors and Actuators, A: Physical 79 (1) : 31-35. ScholarBank@NUS Repository. https://doi.org/10.1016/S0924-4247(98)00272-6
dc.identifier.issn09244247
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/92655
dc.description.abstractThe use of AlxGa1-x As film based sensors for measuring contact pressure is described. It is shown that the pressure sensors display a nearly linear dependence of resistance to contact pressure and temperature. Pressure sensitivity ranges from 0.09%/MPa to 0.12%/MPa (with a non-linearity of
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/S0924-4247(98)00272-6
dc.sourceScopus
dc.typeArticle
dc.contributor.departmentMECHANICAL & PRODUCTION ENGINEERING
dc.description.doi10.1016/S0924-4247(98)00272-6
dc.description.sourcetitleSensors and Actuators, A: Physical
dc.description.volume79
dc.description.issue1
dc.description.page31-35
dc.description.codenSAAPE
dc.identifier.isiut000084935300005
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