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|Title:||AlxGa1-xAs semiconductor sensor for contact pressure measurement|
|Authors:||Toh, S.-L. |
|Citation:||Toh, S.-L., Tay, C.-J., Ng, S.-H., Rahman, M. (2000-01-25). AlxGa1-xAs semiconductor sensor for contact pressure measurement. Sensors and Actuators, A: Physical 79 (1) : 31-35. ScholarBank@NUS Repository. https://doi.org/10.1016/S0924-4247(98)00272-6|
|Abstract:||The use of AlxGa1-x As film based sensors for measuring contact pressure is described. It is shown that the pressure sensors display a nearly linear dependence of resistance to contact pressure and temperature. Pressure sensitivity ranges from 0.09%/MPa to 0.12%/MPa (with a non-linearity of|
|Source Title:||Sensors and Actuators, A: Physical|
|Appears in Collections:||Staff Publications|
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