Please use this identifier to cite or link to this item: https://doi.org/10.1016/S0924-4247(98)00272-6
Title: AlxGa1-xAs semiconductor sensor for contact pressure measurement
Authors: Toh, S.-L. 
Tay, C.-J. 
Ng, S.-H.
Rahman, M. 
Issue Date: 25-Jan-2000
Citation: Toh, S.-L., Tay, C.-J., Ng, S.-H., Rahman, M. (2000-01-25). AlxGa1-xAs semiconductor sensor for contact pressure measurement. Sensors and Actuators, A: Physical 79 (1) : 31-35. ScholarBank@NUS Repository. https://doi.org/10.1016/S0924-4247(98)00272-6
Abstract: The use of AlxGa1-x As film based sensors for measuring contact pressure is described. It is shown that the pressure sensors display a nearly linear dependence of resistance to contact pressure and temperature. Pressure sensitivity ranges from 0.09%/MPa to 0.12%/MPa (with a non-linearity of
Source Title: Sensors and Actuators, A: Physical
URI: http://scholarbank.nus.edu.sg/handle/10635/92655
ISSN: 09244247
DOI: 10.1016/S0924-4247(98)00272-6
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