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https://doi.org/10.1142/S0219581X05003723
| Title: | Nanotips cold-end contact for microcooling systems | Authors: | Tan, K.-L. Iliescu, C. Tay, F. Chua, H.-T. Miao, J. |
Keywords: | Nanotips Plasma Thermoelectric |
Issue Date: | Aug-2005 | Citation: | Tan, K.-L., Iliescu, C., Tay, F., Chua, H.-T., Miao, J. (2005-08). Nanotips cold-end contact for microcooling systems. International Journal of Nanoscience 4 (4) : 701-707. ScholarBank@NUS Repository. https://doi.org/10.1142/S0219581X05003723 | Abstract: | The paper presents the fabrication of nanotips cold-end contact for microcooling system. The fabrication process is based on an optimized isotropic plasma etching in SF6/O2 using an ICP-deep RIE system from STS. We managed to fabricate the radius of the nanotips which are below 50 nm. © World Scientific Publishing Company. | Source Title: | International Journal of Nanoscience | URI: | http://scholarbank.nus.edu.sg/handle/10635/85470 | ISSN: | 0219581X | DOI: | 10.1142/S0219581X05003723 |
| Appears in Collections: | Staff Publications |
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