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Please use this identifier to cite or link to this item: https://doi.org/10.1142/S0219581X05003723
DC FieldValue
dc.titleNanotips cold-end contact for microcooling systems
dc.contributor.authorTan, K.-L.
dc.contributor.authorIliescu, C.
dc.contributor.authorTay, F.
dc.contributor.authorChua, H.-T.
dc.contributor.authorMiao, J.
dc.date.accessioned2014-10-07T09:08:23Z
dc.date.available2014-10-07T09:08:23Z
dc.date.issued2005-08
dc.identifier.citationTan, K.-L., Iliescu, C., Tay, F., Chua, H.-T., Miao, J. (2005-08). Nanotips cold-end contact for microcooling systems. International Journal of Nanoscience 4 (4) : 701-707. ScholarBank@NUS Repository. https://doi.org/10.1142/S0219581X05003723
dc.identifier.issn0219581X
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/85470
dc.description.abstractThe paper presents the fabrication of nanotips cold-end contact for microcooling system. The fabrication process is based on an optimized isotropic plasma etching in SF6/O2 using an ICP-deep RIE system from STS. We managed to fabricate the radius of the nanotips which are below 50 nm. © World Scientific Publishing Company.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1142/S0219581X05003723
dc.sourceScopus
dc.subjectNanotips
dc.subjectPlasma
dc.subjectThermoelectric
dc.typeArticle
dc.contributor.departmentMECHANICAL ENGINEERING
dc.description.doi10.1142/S0219581X05003723
dc.description.sourcetitleInternational Journal of Nanoscience
dc.description.volume4
dc.description.issue4
dc.description.page701-707
dc.identifier.isiut000246301500038
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