Please use this identifier to cite or link to this item: https://doi.org/10.1142/S0219581X05003723
Title: Nanotips cold-end contact for microcooling systems
Authors: Tan, K.-L.
Iliescu, C.
Tay, F. 
Chua, H.-T. 
Miao, J.
Keywords: Nanotips
Plasma
Thermoelectric
Issue Date: Aug-2005
Citation: Tan, K.-L., Iliescu, C., Tay, F., Chua, H.-T., Miao, J. (2005-08). Nanotips cold-end contact for microcooling systems. International Journal of Nanoscience 4 (4) : 701-707. ScholarBank@NUS Repository. https://doi.org/10.1142/S0219581X05003723
Abstract: The paper presents the fabrication of nanotips cold-end contact for microcooling system. The fabrication process is based on an optimized isotropic plasma etching in SF6/O2 using an ICP-deep RIE system from STS. We managed to fabricate the radius of the nanotips which are below 50 nm. © World Scientific Publishing Company.
Source Title: International Journal of Nanoscience
URI: http://scholarbank.nus.edu.sg/handle/10635/85470
ISSN: 0219581X
DOI: 10.1142/S0219581X05003723
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

1
checked on Jul 21, 2018

Page view(s)

20
checked on May 4, 2018

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.