Please use this identifier to cite or link to this item:
https://doi.org/10.1109/LED.2008.920267
Title: | Si-nanowire based gate-all-around nonvolatile SONOS memory cell | Authors: | Fu, J. Singh, N. Buddharaju, K.D. Teo, S.H.G. Shen, C. Jiang, Y. Zhu, C.X. Yu, M.B. Lo, G.Q. Balasubramanian, N. Kwong, D.L. Gnani, E. Baccarani, G. |
Keywords: | Gate-all-around (GAA) Nanowire (NW) Nonvolatile memory (NVM) Silicon-oxide-nitride-oxide-silicon (SONOS) |
Issue Date: | May-2008 | Citation: | Fu, J., Singh, N., Buddharaju, K.D., Teo, S.H.G., Shen, C., Jiang, Y., Zhu, C.X., Yu, M.B., Lo, G.Q., Balasubramanian, N., Kwong, D.L., Gnani, E., Baccarani, G. (2008-05). Si-nanowire based gate-all-around nonvolatile SONOS memory cell. IEEE Electron Device Letters 29 (5) : 518-521. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2008.920267 | Abstract: | This letter presents a high-speed silicon-oxide-nitride-oxide-silicon (SONOS) nonvolatile memory cell in gateall-around Si-nanowire (NW) architecture, which is fabricated by using a top-down process technology. The NW cell exhibits faster program and erase (P/E) speed compared to the corresponding planar device; 1 μs for programming and 1 ms for erasing at VGS = ±11 V with a threshold voltage shift "ΔVTH" of 2.6 V using the Fowler-Nordheim tunneling mechanism. At these P/E conditions, the planar device does not show appreciable change. The improvement is originated from: 1) increased electric field at the Si-SiO2 interface; 2) reduced effective tunnel barrier width; and 3) low electric field in the blocking oxide, as analyzed through simulation. In addition, good data retention makes the NW-based SONOS cell a potential candidate for future high-speed low-voltage NAND-type nonvolatile Flash memory applications. © 2008 IEEE. | Source Title: | IEEE Electron Device Letters | URI: | http://scholarbank.nus.edu.sg/handle/10635/83028 | ISSN: | 07413106 | DOI: | 10.1109/LED.2008.920267 |
Appears in Collections: | Staff Publications |
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