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https://doi.org/10.1063/1.1555708
| Title: | Nitride-mediated epitaxy of CoSi2 on Si(001) | Authors: | Chong, R.K.K. Yeadon, M. Choi, W.K. Stach, E.A. Boothroyd, C.B. |
Issue Date: | 24-Mar-2003 | Citation: | Chong, R.K.K., Yeadon, M., Choi, W.K., Stach, E.A., Boothroyd, C.B. (2003-03-24). Nitride-mediated epitaxy of CoSi2 on Si(001). Applied Physics Letters 82 (12) : 1833-1835. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1555708 | Abstract: | A study was performed on nitride-mediated epitaxy of CoSi2 on Si (001). An ultrathin layer of silicon nitride was formed by exposure to ammonia gas at 900 °C, followed by the deposition of a layer of Co at room temperature. It was found that CoSi2 islands were elongated along the in-plane Si(110) directions, consistent with reports of the deposition of Co by molecular beam epitaxy on clean Si(100) at elevated temperature and low deposition rates. | Source Title: | Applied Physics Letters | URI: | http://scholarbank.nus.edu.sg/handle/10635/82765 | ISSN: | 00036951 | DOI: | 10.1063/1.1555708 |
| Appears in Collections: | Staff Publications |
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