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Title: Gate-induced drain leakage current enhanced by plasma charging damage
Authors: Ma, S.
Zhang, Y.
Li, M.F. 
Li, W.
Xie, J.
Sheng, G.T.T.
Yen, A.C.
Wang, J.L.F.
Keywords: CMOSFET
Leakage current
Plasma charging damage
Issue Date: May-2001
Citation: Ma, S., Zhang, Y., Li, M.F., Li, W., Xie, J., Sheng, G.T.T., Yen, A.C., Wang, J.L.F. (2001-05). Gate-induced drain leakage current enhanced by plasma charging damage. IEEE Transactions on Electron Devices 48 (5) : 1006-1008. ScholarBank@NUS Repository.
Abstract: Correlation between gate-induced drain leakage current (GIDL) current I GIDL and plasma charging damage is investigated for the p-MOSFETs. I GIDL and maximum charge pumping current show the same trend as a function of antenna area ratio (AAR) and cell location. Enhancement of I GIDL is mainly attributed to the increase of Si/SiO 2 interface traps generated in the plasma processes and is not related to the small amount of trapped charge in the oxide.
Source Title: IEEE Transactions on Electron Devices
ISSN: 00189383
DOI: 10.1109/16.918252
Appears in Collections:Staff Publications

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