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Title: C-axis-textured LiNbO3 thin films on Si (111) substrates
Authors: Cheng, S.D.
Han, X.Q.
Kam, C.H.
Zhou, Y.
Lam, Y.L.
Oh, J.T.
Xu, X.W. 
Chong, T.C. 
Issue Date: Oct-2001
Citation: Cheng, S.D.,Han, X.Q.,Kam, C.H.,Zhou, Y.,Lam, Y.L.,Oh, J.T.,Xu, X.W.,Chong, T.C. (2001-10). C-axis-textured LiNbO3 thin films on Si (111) substrates. Applied Physics A: Materials Science and Processing 73 (4) : 511-514. ScholarBank@NUS Repository.
Abstract: We have successfully prepared highly c-axis-textured LiNbO3 films on hydrogen-terminated Si (111) substrate using sol-gel spin-coating and rapid thermal annealing. These highly c-axis-textured films were obtained with a preheating at 300°C for 15 min followed by a rapid thermal annealing at 500-700°C for 120s. The c-axis orientation of the LiNbO3 film is due to a weak effect caused by the 3-fold symmetry match between the film and the Si (111) substrate. The c-axis orientation of LiNbO3 films is very useful in integrated optics devices and metal-ferroelectric-semiconductor nonvolatile memory applications.
Source Title: Applied Physics A: Materials Science and Processing
ISSN: 09478396
Appears in Collections:Staff Publications

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