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|Title:||C-axis-textured LiNbO3 thin films on Si (111) substrates|
|Citation:||Cheng, S.D.,Han, X.Q.,Kam, C.H.,Zhou, Y.,Lam, Y.L.,Oh, J.T.,Xu, X.W.,Chong, T.C. (2001-10). C-axis-textured LiNbO3 thin films on Si (111) substrates. Applied Physics A: Materials Science and Processing 73 (4) : 511-514. ScholarBank@NUS Repository.|
|Abstract:||We have successfully prepared highly c-axis-textured LiNbO3 films on hydrogen-terminated Si (111) substrate using sol-gel spin-coating and rapid thermal annealing. These highly c-axis-textured films were obtained with a preheating at 300°C for 15 min followed by a rapid thermal annealing at 500-700°C for 120s. The c-axis orientation of the LiNbO3 film is due to a weak effect caused by the 3-fold symmetry match between the film and the Si (111) substrate. The c-axis orientation of LiNbO3 films is very useful in integrated optics devices and metal-ferroelectric-semiconductor nonvolatile memory applications.|
|Source Title:||Applied Physics A: Materials Science and Processing|
|Appears in Collections:||Staff Publications|
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