Please use this identifier to cite or link to this item:
Title: Non-destructive evaluation of MEMS components by optical methods
Authors: Tay, C.J. 
Quan, C. 
Wang, S.H. 
Keywords: Mems
Non-destructive evaluation
Optical fibre
White light interferometry
Issue Date: 2009
Citation: Tay, C.J.,Quan, C.,Wang, S.H. (2009). Non-destructive evaluation of MEMS components by optical methods. Proceedings of SPIE - The International Society for Optical Engineering 7375 : -. ScholarBank@NUS Repository.
Abstract: In this work, a white light interferometry technique has been developed for non-destructive testing of micro-components. Essentially, the method utilizes a white light source which illuminates a test object using a modified Michelson interferometer configuration. The test object is mounted on a piezoelectric transducer (PZT) moving stage with a resolution of 1 nm. Images of the test objects are recorded using a CCD camera and stored in a PC for subsequent processing. Tests are conducted on an etched micro-beam which contains un-etched residual remains and optical multifibre ends. The results obtained show good agreement with those obtained from existing commercial profilometers and atomic force microscope. © 2009 SPIE.
Source Title: Proceedings of SPIE - The International Society for Optical Engineering
ISSN: 0277786X
DOI: 10.1117/12.839234
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

Page view(s)

checked on Oct 13, 2019

Google ScholarTM



Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.