Non-destructive evaluation of MEMS components by optical methods

Abstract

In this work, a white light interferometry technique has been developed for non-destructive testing of micro-components. Essentially, the method utilizes a white light source which illuminates a test object using a modified Michelson interferometer configuration. The test object is mounted on a piezoelectric transducer (PZT) moving stage with a resolution of 1 nm. Images of the test objects are recorded using a CCD camera and stored in a PC for subsequent processing. Tests are conducted on an etched micro-beam which contains un-etched residual remains and optical multifibre ends. The results obtained show good agreement with those obtained from existing commercial profilometers and atomic force microscope. © 2009 SPIE.