Please use this identifier to cite or link to this item:
|Title:||Non-destructive evaluation of MEMS components by optical methods||Authors:||Tay, C.J.
White light interferometry
|Issue Date:||2009||Citation:||Tay, C.J.,Quan, C.,Wang, S.H. (2009). Non-destructive evaluation of MEMS components by optical methods. Proceedings of SPIE - The International Society for Optical Engineering 7375 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.839234||Abstract:||In this work, a white light interferometry technique has been developed for non-destructive testing of micro-components. Essentially, the method utilizes a white light source which illuminates a test object using a modified Michelson interferometer configuration. The test object is mounted on a piezoelectric transducer (PZT) moving stage with a resolution of 1 nm. Images of the test objects are recorded using a CCD camera and stored in a PC for subsequent processing. Tests are conducted on an etched micro-beam which contains un-etched residual remains and optical multifibre ends. The results obtained show good agreement with those obtained from existing commercial profilometers and atomic force microscope. © 2009 SPIE.||Source Title:||Proceedings of SPIE - The International Society for Optical Engineering||URI:||http://scholarbank.nus.edu.sg/handle/10635/73682||ISSN:||0277786X||DOI:||10.1117/12.839234|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Oct 13, 2019
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.