Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.839234
Title: Non-destructive evaluation of MEMS components by optical methods
Authors: Tay, C.J. 
Quan, C. 
Wang, S.H. 
Keywords: Mems
Micro-beam
Non-destructive evaluation
Optical fibre
White light interferometry
Issue Date: 2009
Source: Tay, C.J.,Quan, C.,Wang, S.H. (2009). Non-destructive evaluation of MEMS components by optical methods. Proceedings of SPIE - The International Society for Optical Engineering 7375 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.839234
Abstract: In this work, a white light interferometry technique has been developed for non-destructive testing of micro-components. Essentially, the method utilizes a white light source which illuminates a test object using a modified Michelson interferometer configuration. The test object is mounted on a piezoelectric transducer (PZT) moving stage with a resolution of 1 nm. Images of the test objects are recorded using a CCD camera and stored in a PC for subsequent processing. Tests are conducted on an etched micro-beam which contains un-etched residual remains and optical multifibre ends. The results obtained show good agreement with those obtained from existing commercial profilometers and atomic force microscope. © 2009 SPIE.
Source Title: Proceedings of SPIE - The International Society for Optical Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/73682
ISSN: 0277786X
DOI: 10.1117/12.839234
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