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Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.839234
DC FieldValue
dc.titleNon-destructive evaluation of MEMS components by optical methods
dc.contributor.authorTay, C.J.
dc.contributor.authorQuan, C.
dc.contributor.authorWang, S.H.
dc.date.accessioned2014-06-19T05:38:04Z
dc.date.available2014-06-19T05:38:04Z
dc.date.issued2009
dc.identifier.citationTay, C.J.,Quan, C.,Wang, S.H. (2009). Non-destructive evaluation of MEMS components by optical methods. Proceedings of SPIE - The International Society for Optical Engineering 7375 : -. ScholarBank@NUS Repository. <a href="https://doi.org/10.1117/12.839234" target="_blank">https://doi.org/10.1117/12.839234</a>
dc.identifier.issn0277786X
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/73682
dc.description.abstractIn this work, a white light interferometry technique has been developed for non-destructive testing of micro-components. Essentially, the method utilizes a white light source which illuminates a test object using a modified Michelson interferometer configuration. The test object is mounted on a piezoelectric transducer (PZT) moving stage with a resolution of 1 nm. Images of the test objects are recorded using a CCD camera and stored in a PC for subsequent processing. Tests are conducted on an etched micro-beam which contains un-etched residual remains and optical multifibre ends. The results obtained show good agreement with those obtained from existing commercial profilometers and atomic force microscope. © 2009 SPIE.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1117/12.839234
dc.sourceScopus
dc.subjectMems
dc.subjectMicro-beam
dc.subjectNon-destructive evaluation
dc.subjectOptical fibre
dc.subjectWhite light interferometry
dc.typeConference Paper
dc.contributor.departmentMECHANICAL ENGINEERING
dc.description.doi10.1117/12.839234
dc.description.sourcetitleProceedings of SPIE - The International Society for Optical Engineering
dc.description.volume7375
dc.description.page-
dc.description.codenPSISD
dc.identifier.isiutNOT_IN_WOS
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