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|Title:||A compact circumferential scanned endoscopic imaging probe using a MEMS-driven pyramidal polygon reflector||Authors:||Mu, X.J.
|Issue Date:||2012||Citation:||Mu, X.J.,Zhou, G.,Yu, H.B.,Du, Y.,Feng, H.H.,Tsai, J.M.L.,Chau, F.S. (2012). A compact circumferential scanned endoscopic imaging probe using a MEMS-driven pyramidal polygon reflector. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) : 902-905. ScholarBank@NUS Repository. https://doi.org/10.1109/MEMSYS.2012.6170331||Abstract:||A novel prototype of electrothermal chevron-beam actuator based microelectromechanical systems (MEMS) platform has been successfully developed for circumferential scan. Microassembly technology is utilized to construct this platform, which consists of a MEMS chevron-beam type microactuator and a micro pyramidal polygon reflector. The proposed electrothermal microactuators with a two-stage electrothermal cascaded chevron-beam driving mechanism provide displacement amplification, and thus driving a highly reflective micro-pyramidal polygon reflector to rotate a large angle for light beam scan. This MEMS platform is ultra-compact, supports circumferential imaging capability, and is suitable for endoscopic optical coherence tomography (EOCT) application, for example intravascular cancer detection. © 2012 IEEE.||Source Title:||Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)||URI:||http://scholarbank.nus.edu.sg/handle/10635/73009||ISBN:||9781467303248||ISSN:||10846999||DOI:||10.1109/MEMSYS.2012.6170331|
|Appears in Collections:||Staff Publications|
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