Please use this identifier to cite or link to this item:
https://doi.org/10.1109/MEMSYS.2012.6170331
| Title: | A compact circumferential scanned endoscopic imaging probe using a MEMS-driven pyramidal polygon reflector | Authors: | Mu, X.J. Zhou, G. Yu, H.B. Du, Y. Feng, H.H. Tsai, J.M.L. Chau, F.S. |
Issue Date: | 2012 | Citation: | Mu, X.J., Zhou, G., Yu, H.B., Du, Y., Feng, H.H., Tsai, J.M.L., Chau, F.S. (2012). A compact circumferential scanned endoscopic imaging probe using a MEMS-driven pyramidal polygon reflector. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) : 902-905. ScholarBank@NUS Repository. https://doi.org/10.1109/MEMSYS.2012.6170331 | Abstract: | A novel prototype of electrothermal chevron-beam actuator based microelectromechanical systems (MEMS) platform has been successfully developed for circumferential scan. Microassembly technology is utilized to construct this platform, which consists of a MEMS chevron-beam type microactuator and a micro pyramidal polygon reflector. The proposed electrothermal microactuators with a two-stage electrothermal cascaded chevron-beam driving mechanism provide displacement amplification, and thus driving a highly reflective micro-pyramidal polygon reflector to rotate a large angle for light beam scan. This MEMS platform is ultra-compact, supports circumferential imaging capability, and is suitable for endoscopic optical coherence tomography (EOCT) application, for example intravascular cancer detection. © 2012 IEEE. | Source Title: | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | URI: | http://scholarbank.nus.edu.sg/handle/10635/73009 | ISBN: | 9781467303248 | ISSN: | 10846999 | DOI: | 10.1109/MEMSYS.2012.6170331 |
| Appears in Collections: | Staff Publications |
Show full item record
Files in This Item:
There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.