Please use this identifier to cite or link to this item: https://doi.org/10.1109/MEMSYS.2012.6170331
Title: A compact circumferential scanned endoscopic imaging probe using a MEMS-driven pyramidal polygon reflector
Authors: Mu, X.J.
Zhou, G. 
Yu, H.B. 
Du, Y. 
Feng, H.H.
Tsai, J.M.L.
Chau, F.S. 
Issue Date: 2012
Source: Mu, X.J.,Zhou, G.,Yu, H.B.,Du, Y.,Feng, H.H.,Tsai, J.M.L.,Chau, F.S. (2012). A compact circumferential scanned endoscopic imaging probe using a MEMS-driven pyramidal polygon reflector. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) : 902-905. ScholarBank@NUS Repository. https://doi.org/10.1109/MEMSYS.2012.6170331
Abstract: A novel prototype of electrothermal chevron-beam actuator based microelectromechanical systems (MEMS) platform has been successfully developed for circumferential scan. Microassembly technology is utilized to construct this platform, which consists of a MEMS chevron-beam type microactuator and a micro pyramidal polygon reflector. The proposed electrothermal microactuators with a two-stage electrothermal cascaded chevron-beam driving mechanism provide displacement amplification, and thus driving a highly reflective micro-pyramidal polygon reflector to rotate a large angle for light beam scan. This MEMS platform is ultra-compact, supports circumferential imaging capability, and is suitable for endoscopic optical coherence tomography (EOCT) application, for example intravascular cancer detection. © 2012 IEEE.
Source Title: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
URI: http://scholarbank.nus.edu.sg/handle/10635/73009
ISBN: 9781467303248
ISSN: 10846999
DOI: 10.1109/MEMSYS.2012.6170331
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