Permanent magnet finger-size scanning electron microscope columns

Abstract

This paper presents permanent magnet scanning electron microscope (SEM) designs for both tungsten and field emission guns. Each column makes use of permanent magnet technology and operates at a fixed primary beam voltage. A prototype column operating at a beam voltage of 15 kV was made and tested inside the specimen chamber of a conventional SEM. A small electrostatic stigmator unit and dedicated scanning coils were integrated into the column. The scan coils were wound directly around the objective lens iron core in order to reduce its size. Preliminary experimental images of a test grid specimen were obtained through the prototype finger-size column, demonstrating that it is in principle feasible. © 2010 Elsevier B.V. Allrights reserved.