Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.nima.2010.12.202
Title: Permanent magnet finger-size scanning electron microscope columns
Authors: Nelliyan, K. 
Khursheed, A. 
Keywords: Condenser lens
Objective lens
Permanent magnet
Scanning electron microscope
Issue Date: 21-Jul-2011
Source: Nelliyan, K., Khursheed, A. (2011-07-21). Permanent magnet finger-size scanning electron microscope columns. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 645 (1) : 41-45. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nima.2010.12.202
Abstract: This paper presents permanent magnet scanning electron microscope (SEM) designs for both tungsten and field emission guns. Each column makes use of permanent magnet technology and operates at a fixed primary beam voltage. A prototype column operating at a beam voltage of 15 kV was made and tested inside the specimen chamber of a conventional SEM. A small electrostatic stigmator unit and dedicated scanning coils were integrated into the column. The scan coils were wound directly around the objective lens iron core in order to reduce its size. Preliminary experimental images of a test grid specimen were obtained through the prototype finger-size column, demonstrating that it is in principle feasible. © 2010 Elsevier B.V. Allrights reserved.
Source Title: Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
URI: http://scholarbank.nus.edu.sg/handle/10635/71426
ISSN: 01689002
DOI: 10.1016/j.nima.2010.12.202
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