Please use this identifier to cite or link to this item:
|Title:||Permanent magnet finger-size scanning electron microscope columns|
|Authors:||Nelliyan, K. |
Scanning electron microscope
|Citation:||Nelliyan, K., Khursheed, A. (2011-07-21). Permanent magnet finger-size scanning electron microscope columns. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 645 (1) : 41-45. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nima.2010.12.202|
|Abstract:||This paper presents permanent magnet scanning electron microscope (SEM) designs for both tungsten and field emission guns. Each column makes use of permanent magnet technology and operates at a fixed primary beam voltage. A prototype column operating at a beam voltage of 15 kV was made and tested inside the specimen chamber of a conventional SEM. A small electrostatic stigmator unit and dedicated scanning coils were integrated into the column. The scan coils were wound directly around the objective lens iron core in order to reduce its size. Preliminary experimental images of a test grid specimen were obtained through the prototype finger-size column, demonstrating that it is in principle feasible. © 2010 Elsevier B.V. Allrights reserved.|
|Source Title:||Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Jun 22, 2018
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.