Please use this identifier to cite or link to this item:
|Title:||Laser-material interaction and its applications in surface Micro/Nanoprocessing||Authors:||Minghui, H.||Keywords:||Heat affected zone
Laser precision engineering
|Issue Date:||2010||Citation:||Minghui, H. (2010). Laser-material interaction and its applications in surface Micro/Nanoprocessing. AIP Conference Proceedings 1278 : 293-302. ScholarBank@NUS Repository. https://doi.org/10.1063/1.3507115||Abstract:||How to achieve small heat affected zone (HAZ) is a key issue for high quality laser processing. Ultra-short laser irradiation and hybrid laser processing can lead to precision engineering of difficultly processed substrates, such as drilling of heat sensitive bio-polymer films and singulation/ablation of glass and Si substrates. Laser processing in near field can overcome the optical diffraction limit and push the process resolution down to sub-50 nm. To solve the technical bottleneck of slow laser nanoprocessing, parallel (multi-beam) and maskless laser processing techniques are developed. © 2010 American Institute of Physics.||Source Title:||AIP Conference Proceedings||URI:||http://scholarbank.nus.edu.sg/handle/10635/70770||ISBN:||9780735408289||ISSN:||0094243X||DOI:||10.1063/1.3507115|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Apr 14, 2019
checked on Apr 12, 2019
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.