Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.3507115
Title: Laser-material interaction and its applications in surface Micro/Nanoprocessing
Authors: Minghui, H. 
Keywords: Heat affected zone
Laser precision engineering
Near field
Parallel processing
Issue Date: 2010
Source: Minghui, H. (2010). Laser-material interaction and its applications in surface Micro/Nanoprocessing. AIP Conference Proceedings 1278 : 293-302. ScholarBank@NUS Repository. https://doi.org/10.1063/1.3507115
Abstract: How to achieve small heat affected zone (HAZ) is a key issue for high quality laser processing. Ultra-short laser irradiation and hybrid laser processing can lead to precision engineering of difficultly processed substrates, such as drilling of heat sensitive bio-polymer films and singulation/ablation of glass and Si substrates. Laser processing in near field can overcome the optical diffraction limit and push the process resolution down to sub-50 nm. To solve the technical bottleneck of slow laser nanoprocessing, parallel (multi-beam) and maskless laser processing techniques are developed. © 2010 American Institute of Physics.
Source Title: AIP Conference Proceedings
URI: http://scholarbank.nus.edu.sg/handle/10635/70770
ISBN: 9780735408289
ISSN: 0094243X
DOI: 10.1063/1.3507115
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