Please use this identifier to cite or link to this item:
https://doi.org/10.1109/CLEOPR.2009.5292198
| Title: | Femtosecond laser irradiation for functional micro-/nanostructure fabrication | Authors: | Hong, M. Chen, Z. Tang, M. Shi, L. Chong, T.C. |
Keywords: | Fs laser Microfabrication Nano-engineering |
Issue Date: | 2009 | Citation: | Hong, M.,Chen, Z.,Tang, M.,Shi, L.,Chong, T.C. (2009). Femtosecond laser irradiation for functional micro-/nanostructure fabrication. Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest : -. ScholarBank@NUS Repository. https://doi.org/10.1109/CLEOPR.2009.5292198 | Abstract: | Femtosecond laser is a unique processing tool to make micro-/nanostructures on heat sensitive bio-polymer film & glass substrate, to create 3D structures inside glass, to achieve 20-nm nanostructuring and large-area THz, micro-mold and micro-device patterning. © 2009 IEEE. | Source Title: | Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest | URI: | http://scholarbank.nus.edu.sg/handle/10635/70331 | ISBN: | 9781424438303 | DOI: | 10.1109/CLEOPR.2009.5292198 |
| Appears in Collections: | Staff Publications |
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