Please use this identifier to cite or link to this item: https://doi.org/10.1109/CLEOPR.2009.5292198
Title: Femtosecond laser irradiation for functional micro-/nanostructure fabrication
Authors: Hong, M. 
Chen, Z.
Tang, M. 
Shi, L.
Chong, T.C. 
Keywords: Fs laser
Microfabrication
Nano-engineering
Issue Date: 2009
Source: Hong, M.,Chen, Z.,Tang, M.,Shi, L.,Chong, T.C. (2009). Femtosecond laser irradiation for functional micro-/nanostructure fabrication. Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest : -. ScholarBank@NUS Repository. https://doi.org/10.1109/CLEOPR.2009.5292198
Abstract: Femtosecond laser is a unique processing tool to make micro-/nanostructures on heat sensitive bio-polymer film & glass substrate, to create 3D structures inside glass, to achieve 20-nm nanostructuring and large-area THz, micro-mold and micro-device patterning. © 2009 IEEE.
Source Title: Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
URI: http://scholarbank.nus.edu.sg/handle/10635/70331
ISBN: 9781424438303
DOI: 10.1109/CLEOPR.2009.5292198
Appears in Collections:Staff Publications

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