Please use this identifier to cite or link to this item:
https://doi.org/10.1109/CLEOPR.2009.5292198
| DC Field | Value | |
|---|---|---|
| dc.title | Femtosecond laser irradiation for functional micro-/nanostructure fabrication | |
| dc.contributor.author | Hong, M. | |
| dc.contributor.author | Chen, Z. | |
| dc.contributor.author | Tang, M. | |
| dc.contributor.author | Shi, L. | |
| dc.contributor.author | Chong, T.C. | |
| dc.date.accessioned | 2014-06-19T03:10:55Z | |
| dc.date.available | 2014-06-19T03:10:55Z | |
| dc.date.issued | 2009 | |
| dc.identifier.citation | Hong, M.,Chen, Z.,Tang, M.,Shi, L.,Chong, T.C. (2009). Femtosecond laser irradiation for functional micro-/nanostructure fabrication. Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest : -. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/CLEOPR.2009.5292198" target="_blank">https://doi.org/10.1109/CLEOPR.2009.5292198</a> | |
| dc.identifier.isbn | 9781424438303 | |
| dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/70331 | |
| dc.description.abstract | Femtosecond laser is a unique processing tool to make micro-/nanostructures on heat sensitive bio-polymer film & glass substrate, to create 3D structures inside glass, to achieve 20-nm nanostructuring and large-area THz, micro-mold and micro-device patterning. © 2009 IEEE. | |
| dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/CLEOPR.2009.5292198 | |
| dc.source | Scopus | |
| dc.subject | Fs laser | |
| dc.subject | Microfabrication | |
| dc.subject | Nano-engineering | |
| dc.type | Conference Paper | |
| dc.contributor.department | ELECTRICAL & COMPUTER ENGINEERING | |
| dc.contributor.department | CIVIL ENGINEERING | |
| dc.description.doi | 10.1109/CLEOPR.2009.5292198 | |
| dc.description.sourcetitle | Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest | |
| dc.description.page | - | |
| dc.identifier.isiut | NOT_IN_WOS | |
| Appears in Collections: | Staff Publications | |
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