Elemental identification using transmitted and backscattered electrons in an SEM

Abstract

At present, the only elemental analysis technique for a Scanning Electron Microscope (SEM) is Energy Dispersive X-ray (EDX), and its energy resolution is typically limited between 100-150eV, nearly two orders of magnitude larger than the energy resolution of Electron Energy Loss Spectroscopy (EELS) in Transmission Electron Microscopes (TEMs) or Scanning Transmission Electron Microscopes (STEMs). This paper presents elemental identification SEM attachments, using transmitted and backscattered electrons. A miniaturized EELS attachment for conventional SEMs that can correct second-order spherical aberration is presented. A miniaturized magnetic sector backscattered electron (BSE) spectrometer SEM attachment is also designed and tested for a normal SEM. Experimental and Monte-Carlo simulation results of BSE spectra are compared for different materials. © 2008 Elsevier B.V. All rights reserved.