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Title: Elemental identification using transmitted and backscattered electrons in an SEM
Authors: Luo, T. 
Khursheed, A. 
Keywords: Backscattered electron spectrum
Electron energy loss spectroscopy
Spectrometer aberration correction
Issue Date: Aug-2008
Citation: Luo, T., Khursheed, A. (2008-08). Elemental identification using transmitted and backscattered electrons in an SEM. Physics Procedia 1 (1) : 155-160. ScholarBank@NUS Repository.
Abstract: At present, the only elemental analysis technique for a Scanning Electron Microscope (SEM) is Energy Dispersive X-ray (EDX), and its energy resolution is typically limited between 100-150eV, nearly two orders of magnitude larger than the energy resolution of Electron Energy Loss Spectroscopy (EELS) in Transmission Electron Microscopes (TEMs) or Scanning Transmission Electron Microscopes (STEMs). This paper presents elemental identification SEM attachments, using transmitted and backscattered electrons. A miniaturized EELS attachment for conventional SEMs that can correct second-order spherical aberration is presented. A miniaturized magnetic sector backscattered electron (BSE) spectrometer SEM attachment is also designed and tested for a normal SEM. Experimental and Monte-Carlo simulation results of BSE spectra are compared for different materials. © 2008 Elsevier B.V. All rights reserved.
Source Title: Physics Procedia
ISSN: 18753884
DOI: 10.1016/j.phpro.2008.07.091
Appears in Collections:Staff Publications

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