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|Title:||Challenges in the development of precise positioning systems for MEMS/nanotechnology||Authors:||Zhao, S.
Geometrical error compensation
Precise positioning systems
|Issue Date:||2004||Citation:||Zhao, S., Tan, K.K. (2004). Challenges in the development of precise positioning systems for MEMS/nanotechnology. Proceedings of SPIE - The International Society for Optical Engineering 5276 : 119-130. ScholarBank@NUS Repository. https://doi.org/10.1117/12.548710||Abstract:||In this paper, the development of an integrated and open-architecture precision motion control system is presented. The control system is generally applicable, but it is developed with a particular focus on direct drive servo systems based on linear motors. The overall control system is comprehensive, comprising of various selected control and instrumentation components, integrated within a configuration of hardware architecture centred around a dSPACE DS1004 DSP processor board. These components include a precision composite controller (comprising of feedforward and feedback control), a disturbance observer, an adaptive notch filter, and a geometrical error compensator. The hardware architecture, software development platform, user interface, and all constituent control components will be elaborated on in the paper.||Source Title:||Proceedings of SPIE - The International Society for Optical Engineering||URI:||http://scholarbank.nus.edu.sg/handle/10635/69576||ISSN:||0277786X||DOI:||10.1117/12.548710|
|Appears in Collections:||Staff Publications|
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