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dc.titleChallenges in the development of precise positioning systems for MEMS/nanotechnology
dc.contributor.authorZhao, S.
dc.contributor.authorTan, K.K.
dc.identifier.citationZhao, S., Tan, K.K. (2004). Challenges in the development of precise positioning systems for MEMS/nanotechnology. Proceedings of SPIE - The International Society for Optical Engineering 5276 : 119-130. ScholarBank@NUS Repository.
dc.description.abstractIn this paper, the development of an integrated and open-architecture precision motion control system is presented. The control system is generally applicable, but it is developed with a particular focus on direct drive servo systems based on linear motors. The overall control system is comprehensive, comprising of various selected control and instrumentation components, integrated within a configuration of hardware architecture centred around a dSPACE DS1004 DSP processor board. These components include a precision composite controller (comprising of feedforward and feedback control), a disturbance observer, an adaptive notch filter, and a geometrical error compensator. The hardware architecture, software development platform, user interface, and all constituent control components will be elaborated on in the paper.
dc.subjectDisturbance observer
dc.subjectGeometrical error compensation
dc.subjectNotch filter
dc.subjectPrecise positioning systems
dc.subjectRipple compensation
dc.typeConference Paper
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.sourcetitleProceedings of SPIE - The International Society for Optical Engineering
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