Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.548710
DC FieldValue
dc.titleChallenges in the development of precise positioning systems for MEMS/nanotechnology
dc.contributor.authorZhao, S.
dc.contributor.authorTan, K.K.
dc.date.accessioned2014-06-19T03:02:14Z
dc.date.available2014-06-19T03:02:14Z
dc.date.issued2004
dc.identifier.citationZhao, S., Tan, K.K. (2004). Challenges in the development of precise positioning systems for MEMS/nanotechnology. Proceedings of SPIE - The International Society for Optical Engineering 5276 : 119-130. ScholarBank@NUS Repository. https://doi.org/10.1117/12.548710
dc.identifier.issn0277786X
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/69576
dc.description.abstractIn this paper, the development of an integrated and open-architecture precision motion control system is presented. The control system is generally applicable, but it is developed with a particular focus on direct drive servo systems based on linear motors. The overall control system is comprehensive, comprising of various selected control and instrumentation components, integrated within a configuration of hardware architecture centred around a dSPACE DS1004 DSP processor board. These components include a precision composite controller (comprising of feedforward and feedback control), a disturbance observer, an adaptive notch filter, and a geometrical error compensator. The hardware architecture, software development platform, user interface, and all constituent control components will be elaborated on in the paper.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1117/12.548710
dc.sourceScopus
dc.subjectDisturbance observer
dc.subjectGeometrical error compensation
dc.subjectNotch filter
dc.subjectPrecise positioning systems
dc.subjectRipple compensation
dc.typeConference Paper
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1117/12.548710
dc.description.sourcetitleProceedings of SPIE - The International Society for Optical Engineering
dc.description.volume5276
dc.description.page119-130
dc.description.codenPSISD
dc.identifier.isiut000221558600018
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