Please use this identifier to cite or link to this item:
|Title:||Challenges in the development of precise positioning systems for MEMS/nanotechnology|
|Authors:||Zhao, S. |
Geometrical error compensation
Precise positioning systems
|Citation:||Zhao, S., Tan, K.K. (2004). Challenges in the development of precise positioning systems for MEMS/nanotechnology. Proceedings of SPIE - The International Society for Optical Engineering 5276 : 119-130. ScholarBank@NUS Repository. https://doi.org/10.1117/12.548710|
|Abstract:||In this paper, the development of an integrated and open-architecture precision motion control system is presented. The control system is generally applicable, but it is developed with a particular focus on direct drive servo systems based on linear motors. The overall control system is comprehensive, comprising of various selected control and instrumentation components, integrated within a configuration of hardware architecture centred around a dSPACE DS1004 DSP processor board. These components include a precision composite controller (comprising of feedforward and feedback control), a disturbance observer, an adaptive notch filter, and a geometrical error compensator. The hardware architecture, software development platform, user interface, and all constituent control components will be elaborated on in the paper.|
|Source Title:||Proceedings of SPIE - The International Society for Optical Engineering|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Jun 22, 2018
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.