Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.548710
Title: Challenges in the development of precise positioning systems for MEMS/nanotechnology
Authors: Zhao, S. 
Tan, K.K. 
Keywords: Disturbance observer
Geometrical error compensation
Notch filter
Precise positioning systems
Ripple compensation
Issue Date: 2004
Source: Zhao, S., Tan, K.K. (2004). Challenges in the development of precise positioning systems for MEMS/nanotechnology. Proceedings of SPIE - The International Society for Optical Engineering 5276 : 119-130. ScholarBank@NUS Repository. https://doi.org/10.1117/12.548710
Abstract: In this paper, the development of an integrated and open-architecture precision motion control system is presented. The control system is generally applicable, but it is developed with a particular focus on direct drive servo systems based on linear motors. The overall control system is comprehensive, comprising of various selected control and instrumentation components, integrated within a configuration of hardware architecture centred around a dSPACE DS1004 DSP processor board. These components include a precision composite controller (comprising of feedforward and feedback control), a disturbance observer, an adaptive notch filter, and a geometrical error compensator. The hardware architecture, software development platform, user interface, and all constituent control components will be elaborated on in the paper.
Source Title: Proceedings of SPIE - The International Society for Optical Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/69576
ISSN: 0277786X
DOI: 10.1117/12.548710
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