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https://doi.org/10.1109/SENSOR.2007.4300665
| Title: | 6MHz bulk-mode resonator-with Q values exceeding one million | Authors: | Khine, L. Palaniapan, M. Wong, W.-K. |
Keywords: | Bulk-mode Differential drive Micromechanical Quality factor Resonators |
Issue Date: | 2007 | Citation: | Khine, L.,Palaniapan, M.,Wong, W.-K. (2007). 6MHz bulk-mode resonator-with Q values exceeding one million. TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems : 2445-2448. ScholarBank@NUS Repository. https://doi.org/10.1109/SENSOR.2007.4300665 | Abstract: | In this paper, we report a 6.3MHz Lamé-mode square resonator with fully differential drive and sense electronics, exhibiting quality factor, Q values exceeding 1 million in ambient pressures as high as 100Pa. A maximum Q value of 1.6 million was experimentally measured at vacuum pressure of 36 μTorr. It was also experimentally observed that the Q value for the bulk mode resonator was relatively independent for pressures below 100Pa suggesting that the Q is pressure limited for pressure higher than 100Pa. This resonator was fabricated using SOIMUMPs process from MEMSCAP. ©2007 IEEE. | Source Title: | TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems | URI: | http://scholarbank.nus.edu.sg/handle/10635/68691 | ISBN: | 1424408423 | DOI: | 10.1109/SENSOR.2007.4300665 |
| Appears in Collections: | Staff Publications |
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