Please use this identifier to cite or link to this item: https://doi.org/10.1109/SENSOR.2007.4300665
Title: 6MHz bulk-mode resonator-with Q values exceeding one million
Authors: Khine, L.
Palaniapan, M. 
Wong, W.-K. 
Keywords: Bulk-mode
Differential drive
Micromechanical
Quality factor
Resonators
Issue Date: 2007
Source: Khine, L.,Palaniapan, M.,Wong, W.-K. (2007). 6MHz bulk-mode resonator-with Q values exceeding one million. TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems : 2445-2448. ScholarBank@NUS Repository. https://doi.org/10.1109/SENSOR.2007.4300665
Abstract: In this paper, we report a 6.3MHz Lamé-mode square resonator with fully differential drive and sense electronics, exhibiting quality factor, Q values exceeding 1 million in ambient pressures as high as 100Pa. A maximum Q value of 1.6 million was experimentally measured at vacuum pressure of 36 μTorr. It was also experimentally observed that the Q value for the bulk mode resonator was relatively independent for pressures below 100Pa suggesting that the Q is pressure limited for pressure higher than 100Pa. This resonator was fabricated using SOIMUMPs process from MEMSCAP. ©2007 IEEE.
Source Title: TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
URI: http://scholarbank.nus.edu.sg/handle/10635/68691
ISBN: 1424408423
DOI: 10.1109/SENSOR.2007.4300665
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