12.9MHz Lame-mode differential SOI bulk resonators

Please use this identifier to cite or link to this item: https://doi.org/10.1109/SENSOR.2007.4300492

Title:	12.9MHz Lame-mode differential SOI bulk resonators
Authors:	Khine, L. Palaniapan, M. Wong, W.-K.
Keywords:	Lamé mode MEMS Q Resonators Straight beam anchor T-anchor
Issue Date:	2007
Citation:	Khine, L.,Palaniapan, M.,Wong, W.-K. (2007). 12.9MHz Lame-mode differential SOI bulk resonators. TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems : 1753-1756. ScholarBank@NUS Repository. https://doi.org/10.1109/SENSOR.2007.4300492
Abstract:	In this paper, differentially driven 12.9MHz square resonators in Lamé mode with two different types of anchor - T-anchor and straight beam anchor are presented in an attempt to investigate how the anchor design influences the quality factor, Q values. These square resonators operated in a vacuum pressure of 36μTorr exhibited Q values of 807,000 and 404,000, respectively. This difference in Q values for the two resonators is probably due to differing energy losses in their respective anchors. These resonators were fabricated using SOIMUMPs process from MEMSCAP. ©2007 IEEE.
Source Title:	TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
URI:	http://scholarbank.nus.edu.sg/handle/10635/68667
ISBN:	1424408423
DOI:	10.1109/SENSOR.2007.4300492
Appears in Collections:	Staff Publications

There are no files associated with this item.

Check