Please use this identifier to cite or link to this item: https://doi.org/10.1109/SENSOR.2007.4300492
Title: 12.9MHz Lame-mode differential SOI bulk resonators
Authors: Khine, L.
Palaniapan, M. 
Wong, W.-K. 
Keywords: Lamé mode
MEMS
Q
Resonators
Straight beam anchor
T-anchor
Issue Date: 2007
Citation: Khine, L.,Palaniapan, M.,Wong, W.-K. (2007). 12.9MHz Lame-mode differential SOI bulk resonators. TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems : 1753-1756. ScholarBank@NUS Repository. https://doi.org/10.1109/SENSOR.2007.4300492
Abstract: In this paper, differentially driven 12.9MHz square resonators in Lamé mode with two different types of anchor - T-anchor and straight beam anchor are presented in an attempt to investigate how the anchor design influences the quality factor, Q values. These square resonators operated in a vacuum pressure of 36μTorr exhibited Q values of 807,000 and 404,000, respectively. This difference in Q values for the two resonators is probably due to differing energy losses in their respective anchors. These resonators were fabricated using SOIMUMPs process from MEMSCAP. ©2007 IEEE.
Source Title: TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
URI: http://scholarbank.nus.edu.sg/handle/10635/68667
ISBN: 1424408423
DOI: 10.1109/SENSOR.2007.4300492
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