Please use this identifier to cite or link to this item:
|Title:||12.9MHz Lame-mode differential SOI bulk resonators|
Straight beam anchor
|Citation:||Khine, L.,Palaniapan, M.,Wong, W.-K. (2007). 12.9MHz Lame-mode differential SOI bulk resonators. TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems : 1753-1756. ScholarBank@NUS Repository. https://doi.org/10.1109/SENSOR.2007.4300492|
|Abstract:||In this paper, differentially driven 12.9MHz square resonators in Lamé mode with two different types of anchor - T-anchor and straight beam anchor are presented in an attempt to investigate how the anchor design influences the quality factor, Q values. These square resonators operated in a vacuum pressure of 36μTorr exhibited Q values of 807,000 and 404,000, respectively. This difference in Q values for the two resonators is probably due to differing energy losses in their respective anchors. These resonators were fabricated using SOIMUMPs process from MEMSCAP. ©2007 IEEE.|
|Source Title:||TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Dec 9, 2018
checked on Dec 8, 2018
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.