Thermal imidization of fluorinated poly(amic acid) precursors on a glycidyl methacrylate graft-polymerized Si(100) surface

Please use this identifier to cite or link to this item: https://doi.org/10.1116/1.1340653

Title:	Thermal imidization of fluorinated poly(amic acid) precursors on a glycidyl methacrylate graft-polymerized Si(100) surface
Authors:	Zhang, Y. Tan, K.L. Liaw, B.Y. Liaw, D.J. Kang, E.T. Neoh, K.G.
Issue Date:	Mar-2001
Citation:	Zhang, Y., Tan, K.L., Liaw, B.Y., Liaw, D.J., Kang, E.T., Neoh, K.G. (2001-03). Thermal imidization of fluorinated poly(amic acid) precursors on a glycidyl methacrylate graft-polymerized Si(100) surface. Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films 19 (2) : 547-556. ScholarBank@NUS Repository. https://doi.org/10.1116/1.1340653
Abstract:	A method is developed to obtain good adhesion of fluorinated polyimides (FPI) on a Si(100) surface. The method uses thermal imidization of the fluorinated poly(amic acid) precursors onto an argon plasma-pretreated and glycidyl methacrylate grafted-polymerized Si(100) (GMA-g-Si) surface. It is shown that 180 degree-peel adhesion strengths as high as 8.0 M/cm are achieved by the FPI/GMA-g-Si laminates.
Source Title:	Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
URI:	http://scholarbank.nus.edu.sg/handle/10635/66880
ISSN:	07342101
DOI:	10.1116/1.1340653
Appears in Collections:	Staff Publications

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