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|Title:||Thermal imidization of fluorinated poly(amic acid) precursors on a glycidyl methacrylate graft-polymerized Si(100) surface|
|Authors:||Zhang, Y. |
|Citation:||Zhang, Y., Tan, K.L., Liaw, B.Y., Liaw, D.J., Kang, E.T., Neoh, K.G. (2001-03). Thermal imidization of fluorinated poly(amic acid) precursors on a glycidyl methacrylate graft-polymerized Si(100) surface. Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films 19 (2) : 547-556. ScholarBank@NUS Repository. https://doi.org/10.1116/1.1340653|
|Abstract:||A method is developed to obtain good adhesion of fluorinated polyimides (FPI) on a Si(100) surface. The method uses thermal imidization of the fluorinated poly(amic acid) precursors onto an argon plasma-pretreated and glycidyl methacrylate grafted-polymerized Si(100) (GMA-g-Si) surface. It is shown that 180 degree-peel adhesion strengths as high as 8.0 M/cm are achieved by the FPI/GMA-g-Si laminates.|
|Source Title:||Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films|
|Appears in Collections:||Staff Publications|
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