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|Title:||Embedded photonic structures fabricated in photosensitive glass using proton beam writing||Authors:||Bettiol, A.A.
van Kan, J.A.
Proton beam writing
|Issue Date:||Jul-2007||Citation:||Bettiol, A.A., Udalagama, C.N.B., Teo, E.J., van Kan, J.A., Watt, F. (2007-07). Embedded photonic structures fabricated in photosensitive glass using proton beam writing. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 260 (1) : 357-361. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2007.02.100||Abstract:||In this paper, we present a method that utilizes a focused beam of mega electron volt (MeV) protons to fabricate embedded photonic structures in Foturan™ glass. Both direct modification via proton beam end of range damage and post irradiation heat treatment are used to make the structures. Microfluidic channels with integrated waveguides and optical diffraction gratings are made using this technique. © 2007 Elsevier B.V. All rights reserved.||Source Title:||Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms||URI:||http://scholarbank.nus.edu.sg/handle/10635/64862||ISSN:||0168583X||DOI:||10.1016/j.nimb.2007.02.100|
|Appears in Collections:||Staff Publications|
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