Embedded photonic structures fabricated in photosensitive glass using proton beam writing

Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.nimb.2007.02.100

Title:	Embedded photonic structures fabricated in photosensitive glass using proton beam writing
Authors:	Bettiol, A.A. Udalagama, C.N.B. Teo, E.J. van Kan, J.A. Watt, F.
Keywords:	Glass Gratings Proton beam writing Waveguides
Issue Date:	Jul-2007
Citation:	Bettiol, A.A., Udalagama, C.N.B., Teo, E.J., van Kan, J.A., Watt, F. (2007-07). Embedded photonic structures fabricated in photosensitive glass using proton beam writing. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 260 (1) : 357-361. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2007.02.100
Abstract:	In this paper, we present a method that utilizes a focused beam of mega electron volt (MeV) protons to fabricate embedded photonic structures in Foturan™ glass. Both direct modification via proton beam end of range damage and post irradiation heat treatment are used to make the structures. Microfluidic channels with integrated waveguides and optical diffraction gratings are made using this technique. © 2007 Elsevier B.V. All rights reserved.
Source Title:	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
URI:	http://scholarbank.nus.edu.sg/handle/10635/64862
ISSN:	0168583X
DOI:	10.1016/j.nimb.2007.02.100
Appears in Collections:	Staff Publications

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